光電半導體 沈志雄 博士 研究方向: 微光機電元件 聯絡: 0922217650 hilbert.shen@seed.net.tw.

Presentation on theme: "光電半導體 沈志雄 博士 研究方向: 微光機電元件 聯絡: 0922217650 hilbert.shen@seed.net.tw."— Presentation transcript:

1 光電半導體 沈志雄 博士 研究方向: 微光機電元件 聯絡:

2 課程規劃 Textbook: Semiconductor Devices Physics and Technology, 作者:S.M Sze,書局: John Wiley&Sons,(歐亞書局代理) Reference Books: 1. Amnon Yariv, Optical Electronics 2. J. Wilson, J. F. B. Hawkes, Optoelectronics: An introduction 3. S. M. Sze, Physics of Semiconductor Devices, John Wiely and Sons, 2nd ed., 1987.

3 課程規劃 II 第一至四週 固態物理基本理論 量子物理 晶格結構 鍍膜與長晶 SZE Chapter 1能帶與載子濃度
第一至四週 固態物理基本理論 量子物理 晶格結構 鍍膜與長晶 SZE Chapter 1能帶與載子濃度 Chapter2 載子傳輸現象 第五~七週 Chapter 3 P-N junction 第八~十週 Chapter7 基本光電元件 第九週 期中考試 第十一~十二週 Yariv Chapter5 Interaction of Radiation and Atomic Systems 第十三~十四週 Chapter 6 Theory of Laser Oscillation 第十五~十六週 專題 Silicon 元件 III-V 元件

4 Bohr

5 Pauli

6 Quantum theory

7 Scrödinger equation

8 Spherical representation

9 Bravais Lattice 1848, Auguste Bravais demonstrated that there are fourteen possible point lattices and no more

10 Diamond/Zinc blend structures
Diamond structure: Si Zinc-blend: GaAs

11 長晶,鍍膜製程 長晶: Epitaxy Czochralski Growth Liquid Phase Deposition MOCVD
MBE 鍍膜 Deposition CVD: APCVD PECVD LPCVD VPD: Evaporation: Heater E-GUN Sputtering Thermal Oxidation:

12 Example of IC

13 Thermal Oxidation I.

14 Thermal Oxidation II.

15 Czochralski Growth

16 Vapor Phase Deposition

17 Liquid Phase Deposition
Rotating Sliding The LPE-technology of ESY-8 is based on a quartz-boat sliding-technique. The boat consists of 4 stacks, each containing a substrate-plate with 18 hollows for the substrates and melts, a movable slit-plate to cover the melt during layer-growth, and a crucible for the melt and poly-GaP

18 Applications of LPE

19 MBE Equipment Electron gun eveporators (Si and Ge)
Knudsen cells (Ge, Sb, Co, Al) RHEED Crystal thickness monitor 5-axis goniometer

20 Thermal Coater

21 PECVD

22 LPCVD

23 Damage

24 How to determine the structure
Crystal structures are determined experimentally by X-Ray Diffraction

25 晶格/表面檢測 X-ray SIMS Auger/AES RBS SEM EDS EBIC

26 Surface Analyzer

27 X-ray/ Bragg Diffraction

28 SIMS

29 AES

30 RBS

31 Reference II.