Exhaust system TERY CHEN 927260.

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1 Exhaust system TERY CHEN

2 Exhaust System General Exhaust System (GEX) Acid Exhaust System(SEX)
CVD Exhaust System(CVD EX.) AMX Exhaust System (AMX) Solvent Exhaust System(SOX):

3 Component of Exhaust System
1.General Exhaust System(GEX): Inert Gas, N2, Air, Hot Air, CO2 , N2O etc will be included 2.Acid Exhaust System(SEX) The corrosive gas, toxic gas , acid etc will be included HF, HCl, SF6, BCl3, Cl2, CH3COOH, H3PO4, NHO3, NF3 3.CVD Exhaust System(CVD EX.) Flammable gas etc. will be included NH3, PH3/H2, SiH4, NF3, NO2. 4.AMX Exhaust System (AMX) a.Stripper Exhaust System: Stripper b.Alkalize Exhaust System: NaOH , NH3, Developer 5.Solvent Exhaust System(SOX): IPA, NBA

4 Exhaust Air Volume

5 Duct Material General Exhaust Acid Exhaust Amonia Exhaust
Dry Exhaust : (<50C) (GS:Galvanize Steel) Wet Exhaust : Moisture Exhaust (PPS:Polypropylene) High Temperature Exhaust: (>50C) (GS+Insulation) Acid Exhaust Acid Exhaust System(SEX) (PPS+Sprinkler) CVD Exhaust System(CVD EX.) (SUS Spiral DUCT) Amonia Exhaust .Stripper Exhaust System (SUS Pipe + Insulation) Alkalize Exhaust System (PPS+Sprinkler) Solvent Exhaust SUS Pipe

6 GEX Flow Chart

7 General Exhaust System

8 SEX & CVD EX. Flow Chart

9 Acid Exhaust System

10 CVD Exhaust System

11 AMX Exhaust System Flow Chart

12 Ammonia Exhaust System

13 Solvent Exhaust System
(SUS Spiral Duct + Sprinkler)

14 Solvent Exhaust System

15 Thank you

16 VOC Abatement System

17 Scrubber之結構圖

18 循環水箱(Re-circulation Tank)
SCRUBBER(主體結構圖--1) Exhaust Air 隔柵網 ****** *********** ****** *********** 循環水箱(Re-circulation Tank) ****** ********* ****** ********** ***** *********** ******* ********** ****** *********** ****************** ****** ********* ***************** ***** *********** ****** ********** ***************** ****************** ****** *********** ****** ************ ***** ************* ****** *********** ****** ************ FAN Demister(除霧層) ****************** 填充層( Scrubber Package ) 噴嘴管路及噴嘴 (Spiral nozzles)

19 SCRUBBER(主體結構圖—2) 1 2 a b FAN Exhaust Air 加藥管注入口
(Ball valve for Chemical Inlet) (Spiral nozzles) 循環水壓力計 (Nozzle Manometer) Pump Dosing Tank FAN 洗滌塔壓差計 (Scrubber Manometer) 酸鹼度檢測計 (PH Sensor) Exhaust Air 導電度檢測計 (Conductivity Sensor) 1 2 液位檢測計 (Level Sensor) a b 循環水泵(Re-circulating Pump)

20 補水閥 排水閥

21 Scrubber之控制圖 A B b a

22 為氣體行進之方向；經風管所吸取之氣體(酸OR鹼)會先經由隔柵網進入填充層，在填充層中經由
拉西環表面積所附著的水與其通過之氣體做附著效應，使其化學物質能夠在此層做一沉澱沖洗之效果，而 通過填充層後之氣體隨之進入除霧層顧名思義該層主要是將氣體中之水分稀釋出來，同樣得也是藉由與拉 西環間的附著關係將其水分稀釋出來(如果含水量過則所排出之氣體會呈白色煙霧狀)，最後再經由FAN的 運轉將氣體排入大氣之中。 為水循環流動之方向；水經由內循環pump抽打至洒水頭，再經散射的方式(約150度)平均的噴灑在拉 西環上面

23 Scrubber Performance Calculation
Acid Design Basis Data 1.Scrubber Type：Acid, Horizontal 2.Airflow：50,000 CMH 3.Intake Air Speed Max：2.5 m/s 4.Inlet Temperature：23℃ 5.Inlet concentration：20ppmv of HCl 6.Removal Efficiency：99% HCl 7.Dosing Chemical：NaOH

24 Scrubber Performance Calculation
洗滌塔尺寸設計 填充材寬度與高度 氣體流量＝50,000 CMH＝13.89 m3/s 氣體流速＝2.5 m/s 有效交錯截面積＝13.89/2.5＝5.56 m2 取寬度為 3 m，則高度＝5.56/3＝1.85 實際設計取高度為 2.3 m 則實際氣體流速＝ ＝2.01 m/s

25 Scrubber Performance Calculation
填充深度計算 氣體質量流率(Ｇ) 23℃下之氣體流量＝50,000×(273/(273+23)) ＝46, CMH 在1atm、23℃下，空氣的密度＝ lb/ft3 ＝1.2 kg/m3 則氣體質量流率＝46,114.86×1.2/(3×2.3) ＝8,020 kg/m2．hr ＝1,643 lb/ft2．hr

26 Scrubber Performance Calculation
液體質量流率(Ｌ) 選擇標準液體質量流率為 3,000 lb/hr．ft2 （6 gpm/ft2） 則HTU (for HCl/NaOH)＝3×Ｌ-0.48×Ｇ0.33 （每轉換單元的高度）＝3×3, ×1, ＝0.74 ft 而NTU (數換單元的數目)＝ln (20/0.2) ＝4.6 則填充深度＝0.74×4.6＝3.4 ft＝1 m（＜1.2 m) （HTU for H2SO4＝0.85，最小填充深度3.91 ft）

27 Scrubber Performance Calculation
最小循環水量 液體質量流率＝3,000 lb/hr．ft2 ＝6 gpm/ft2 灑水面積＝3×1.2＝3.6 m2 最小循環水量＝6×3.6× gpm ＝232.5 gpm＝880 l/min 循環泵流量＝80m3/hr＝1,333 l/min (＞880 l/min)

28 Scrubber Performance Calculation
加藥量計算 HCl+NaOHNaCl+H2O Nominal flow rate :50,000×(273/(273+23))= 46,115 CMH HCl的摩爾流率 46,115m3/hr×20/106(ppm)×36.5(kg/kg-mole)/22.4(m3/kg-mole) = 1.5 kg/hr=0.041 kg-mol/hr NaOH 消耗量 1 mol HCl須要1 mol NaOH來反應 0.041×1×40 = 1.64 kg/hr(100%NaOH) = 8.2 kg/hr(20%NaOH) = 6.8 L/hr (20% NaOH的比重=1.21)

29 Scrubber Performance Calculation
加藥量計算 Nominal flow rate :50,000×(273/(273+23))= 46,115 CMH NH3的摩爾流率 46,115m3/hr×20/106(ppm)×17(kg/kg-mole)/22.4(m3/kg-mole) = 0.7 kg/hr=0.041 kg-mol/hr H2SO4 消耗量 2 mol NH3須要1 mol H2SO4來反應 0.041×1/2×98 = 2.0 kg/hr(100%H2SO4) = 10 kg/hr(20%H2SO4) = 8.5 L/hr (20%H2SO4的比重=1.18) 2NH3+2H2O→2NH4OH+H2SO4→(NH4)2SO4+2H2O

30 潤溼因子(Humidity factor)
潤濕因子：洗滌循環水量／（填充物比表面積×洗滌塔填充段水平截面積），單位為m2/hr Hf＝80 / (108 × (3 × 1.2 ))＝0.21 m2/hr (＞0.1 m2/hr) 循環水箱之pH值 酸排循環水箱之pH值設定為 8 （範圍7～9） 鹼排循環水箱之pH值設定為 6 （範圍5～7）