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半導體封裝測試概論 講者 王量玄.

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Presentation on theme: "半導體封裝測試概論 講者 王量玄."— Presentation transcript:

1 半導體封裝測試概論 講者 王量玄

2 大綱 半導體材料及相關應用領域 積體電路種類 積體電路製造 封裝技術發展 傳統封裝與晶圓級封裝(wafer level CSP) 測試

3 半導體材料及相關應用領域 種類 材料 應用 Si 積體電路 (Integrated Circuit) 太陽能電池(Solar Cell)
微機械元件(Micromechanics) 化合物 GaAs GaP ZnSe ZnS 高速高頻積體電路 發光二極體(Light Emitted Diode) 半導體雷射(Semiconductor Laser) 平面顯示器(Flat Panel Displays)

4 積體電路種類 邏輯(Logic) : CPU , 晶片組 (Chip_Set),繪圖晶片 ……..
記憶體(Memory):ROM,SRAM,DRAM,Flash…

5 積體電路製程

6 封裝技術發展 ASE Assembly Milestone

7 傳統封裝與晶圓級封裝(wafer level CSP)
晶粒切割 晶粒貼附 打線 灌膠 彎腳成型 SOJ

8 晶圓級封裝(wafer level CSP)
Balls pad open & Solder bumping Wafer level final testing

9 CONFIDENTIAL Process Flow Wafer incoming

10 CONFIDENTIAL Process Flow BCB coating Sputter Ti/Cu

11 CONFIDENTIAL Process Flow PR coating Cu / Ni / Au trace plating

12 Process Flow PR stripping & Ti/Cu etching Solder mask coating
CONFIDENTIAL Process Flow PR stripping & Ti/Cu etching Solder mask coating

13 CONFIDENTIAL Process Flow Back side marking Ball placement

14 Process Flow Wafer level final testing Dicing saw Pick & place
CONFIDENTIAL Process Flow Wafer level final testing Dicing saw Pick & place

15 測試 測試 Tester 測試機 Memory Tester , Logic Tester , Mix Tester .
測試 測試 Tester 測試機 Memory Tester , Logic Tester , Mix Tester . Handler (自動分類機) & Prober(自動針測機)

16 Memory Tester

17 Handler

18 Wafer Level Final Testing
Load Board Probe Card Solder Ball Copper Post type Wafer Chuck X/Y/Z Step Motor

19 報告完畢 敬請指教 謝謝


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