Dr. Rational You IEK/ITRI 2002/02/01

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1 Dr. Rational You IEK/ITRI 2002/02/01
掃描探針顯微鏡之原理與應用 Dr. Rational You IEK/ITRI 2002/02/01 Source: (2001/05)

2 Outline Source: (2001/05)

3 掃描探針顯微鏡系統架構 Source: (2001/05)

4 (a)探針尖端外形示意圖 (b)以不同探針外形掃描相同輪廓試片之結果
Source: (2001/05)

5 常見的三種SPM微探針 Source: (2001/05)

6 穿隧電流感測器示意圖 Source: (2001/05)

7 力量感測器示意 Source: (2001/05)

8 音叉式光纖探針感測 Source: (2001/05)

9 掃描探針顯微鏡之控制系統與定位平台 Source: (2001/05)

10 掃描探針顯微鏡之應用例 Source: (2001/05)

11 工研院機械所開發之掃描探針顯微鏡 Source: (2001/05)

12 Reference 1. Young, R., Ward, J. and Scire, F., Review of Scientific Instruments, 43, pp , 1972. 2. D. W. Abraham, H. J. Mamin, E. Ganz, and J. Clarke, IBM J. Res. Dev. 30, pp. 492, 1986. 3. 羅士哲、林熙翔、林錫甫﹐“掃描探針顯微加工之發展與應用”﹐機械工業雜誌﹐ Vol. 209, Aug. 2000, pp 。 4. 林夏玉、蔡定平、羅士哲、黃珩春、王鴻年﹐“近場光學之原理與應用發展”﹐機械工業雜誌﹐ Vol. 209, Aug. 2000, pp 。 5. Kuen-Syh Tseng, T. E. Hsieh, Shih-Che Lo and Hsi-Fu Lin, "Search of optimum bias voltage for oxide patterning on Si using scanning tunneling microscope in air," Journal of Vacuum Science Technology B, Vol. 18, No. 2, Mar./Apr. 2000, pp Source: (2001/05)