离子束纳米加工技术 Ion Beam Nanofabrication & Processing

Presentation on theme: "离子束纳米加工技术 Ion Beam Nanofabrication & Processing"— Presentation transcript:

1 离子束纳米加工技术 Ion Beam Nanofabrication & Processing
付德君 Dejun Fu 宜昌后皇真空科技有限公司 Yichang Faerie Vacuum Tech Co. Ltd.

2 等离子体沉积技术 (Plasma vapor deposition, PVD)
数控切削刀具超硬涂层 Hard coatings on cutting tools: TiAlN, TiSiN, TiBN, nanocomposite coatings 精密模具镀层 Endurance coatings on molds: CrN, AlCrN, CrWN 汽车活塞环替代电镀铬层 Anti-wear coatings on piston rings replacing galvanic coatings: CrN, CrWN, DLC 多弧离子镀与磁控溅射镀膜机 Multi-arc ion plating & magnetron sputtering systems

3 Ion beam nano-processing
离子束纳米加工技术 Ion beam nano-processing 超浅结离子注入 Low energy cluster ion implanter for ultra-shallow junction IC fabrication 离子束亚纳米抛光 Ion beam smoothing at sub-nano scale

4 Outline of company Suzhou? Chendgu? Provincial R & D center
Yichang factory Shenzhen factory Provincial Center Intl Cooperation

5 后皇公司 Faerie company

6 Physical vapor deposition
Technical Target Product Physical vapor deposition

7 Products 拉刀 微钻0.15

8 PVD活塞环、模具涂层 130 170 活塞环 模具 模具

9 零部件涂层 纺织钢领 丝锥

10 Ion beam processing

11 MFC 团簇离子装置 离子源 分束器 电源 离化器 束流监测 加速 电控 分子泵 光栏 扫描 聚焦 束流控制 偏转磁铁 分子泵 聚焦 分子泵

12 ~ Thank you ~