Download presentation
Presentation is loading. Please wait.
1
Vibration measurement
南台科技大學 劉雲輝 南台科技大學 劉雲輝 Vibration measurement 劉雲輝 南台科技大學 機械工程系 電話﹕(06) ext.3538 網頁﹕faculty.stut.edu.tw/~yhliu/ Dec 20 , 2005
2
南台科技大學 劉雲輝 Establishing Sensitive Process Tool Vibration Thresholds (of degraded performance) IEST-RP-CC “Measuring and Reporting Vibration in Microelectronics Facilities” Direct measurement placed on a table excited in a precisely controlled shaker Modal testing and analysis natural frequency and mode shape finite element method─difficult to model complex equipment due to no corroborated 、k and B.C. Field measurement installed in a number of location with different vibration level place a shaker on the floor near the equipment
3
Assessment of Vibration Sensitivity
南台科技大學 劉雲輝 Assessment of Vibration Sensitivity Establishing sensitive process tool vibration thresholds Application of controlled vibrational base excitation vibration sensitivity of a 1000x Nikon microscope
Similar presentations
