Edwards真空泵服务方案介绍 The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. © Edwards Limited 2007

E2M275定期维护计划 The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. © Edwards Limited 2007

E2M275旋片泵定期维护计划 The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. © Edwards Limited 2007

E2M275旋片泵定期检查油位 频率：每周 注油口 油位视窗 排油阀 The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. © Edwards Limited 2007

E2M275旋片泵定期更换真空油-1 泵油的作用 密封 润滑 冷却 防止泵内部件腐蚀 防止工艺副产物沉积在泵强内部和油润滑管路内，加剧泵的磨损 泵油的状况 机械泵中的油的状况随着使用时间的增加以及受到气体和副产物的污染会逐步恶化，这可以通过油 的颜色的逐步变化来显示出来。定期更换泵油可以保证泵的良好工作性能，减少接触零件的磨损， 延长泵的使用寿命，Edwards推荐定期检查油的颜色，根据泵油的颜色来判断换油的频率； 为了确保因为长时间运行导致泵油的性能下降而加剧泵的磨损和降低泵的性能，建议泵每运行累计超过3000小时后（无论泵油的颜色如何）就更换油； 对于新泵，由于泵处于机械磨合期，第一次换油的时间不超过500小时 The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. © Edwards Limited 2007

E2M275旋片泵定期更换真空油-2 1，2 ：好，继续观察 3：需要换油 4：立即更换油 5，6，7：停止使用，检查泵 油位视窗 The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. © Edwards Limited 2007

E2M275旋片泵定期清洁/更换内置油精滤器-1 油过滤器状态指示器 需要清洁或更换 停止使用，检查泵， 内置油过滤器 需要清洁 或更换内置油过滤器 好，继续使用 油过滤器状态指示器 The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. © Edwards Limited 2007

E2M275旋片泵定期清洁/更换内置油精滤器-2 The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. © Edwards Limited 2007

E2M275旋片泵定期检查清理入口过滤器 频率：每年 The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. © Edwards Limited 2007

E2M275旋片泵定期清洁电机风扇罩 频率：每年 The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. © Edwards Limited 2007

E2M275定期清洗和检修维护 频率：每年 The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. © Edwards Limited 2007

E2M275定期更换旋片 频率：每累计使用25000小时 25000 3年 The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. © Edwards Limited 2007

清洗维修和标准维修 频率：清洗维修，累计运行25000小时或根据实际需要 标准维修，累计运行50000小时或根据实际需要 1，清洗维修可以在客户现场或返回Edwards指定的维修中心 2。标准维修必须返回到Edwards指定的维修中心 The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. © Edwards Limited 2007