紫外曝光與蝕刻實驗 星期一 黃啟裕: 楊昌浩: 電磁撿測實驗, 光學灌注 陳智城: 雜訊測量, 氧化物製作.

Presentation on theme: "紫外曝光與蝕刻實驗 星期一 黃啟裕: 楊昌浩: 電磁撿測實驗, 光學灌注 陳智城: 雜訊測量, 氧化物製作."— Presentation transcript:

1 紫外曝光與蝕刻實驗 星期一 黃啟裕: 楊昌浩: 電磁撿測實驗, 光學灌注 陳智城: 雜訊測量, 氧化物製作

2 紫外曝光與蝕刻實驗 星期三 黃啟裕: 吳宇正: 光學灌注, 電磁檢測 陳名傑: 雜訊測量, 氧化物製作, 磁共振,

3 實驗有缺失: 暑假當義工, 進一步加強物理與技術的訓練 暑假提供專題研究機會: 先提出實驗構想

4 微米與奈米科技

5 紫外光曝光 電子束曝光 全像術 光罩 光阻- 正光阻與負光阻

6 ● The pattern for resistivity and Hall measurements
V = V3-V2→Resistance Vh = V2-V1→Hall coefficient

7 5 μm

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9 Superconductor YBCO Normal Metal Barrier Ag or Au Insulator
Substrate Cross-sectional diagram of a ramp-edge superconductor/normal-metal/superconductor (SNS) junction

10 Geometry of a serial SQUID array with junction width 3 m

11 Mask Aligner for Photolithography (in clean room, 10000 ppm)
UV lamp Mask holder Sample stage

12 Directly Coupled SQUID Magnetometer
Imd Ib V Imd Direct modulation Ime Ime Integrated modulation coil Ib  V

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14 Device Fabrication Step-edge Junctions and SQUID Arrays

15 Fabrication of step-edge substrates
MgO Ar+ beam (a) (b) Step-edge line

16 Surface morphology of step-edge substrates probed with atomic force microscopy

17 AFM image of the step-edge substrate
Surface morphology of MgO(100) substrate

18 Excimer Laser System Wavelength = 248 nm Pulse Energy = 650 mJ
Max. Rep. Rate = 50 Hz Average Power = 30 Watts

19 3-D Surface Profiler Device Characterization Surface Morphology
Spatial Resolution ( 0.1 nm)

20 Schematic diagram of the rf sputtering system used
La0.7CaCa0.3MnO3 Nd0.7Sr0.3MnO3 PrBa2Cu3Oy Ar+O2 gas YBa2Cu3Oy 5.3 cm 3.5 cm 3 cm shutter rf sputtering gun sample holder water-cooled stainless-steel shielding L. M. Wang, H. W. Yu, H. C. Yang and H. E. Horng, Physica C, 256, 57 (1996).

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22 Geometry of a serial SQUID array with junction width 3 m

23 Typical voltage-flux curve of a SQUID magnetometer at 77 K

24 Ib V (a) (b) (c)

25 Weak Magnetic Fields Biomagnetic fields Environmental fields B (Tesla)
10 -4 -5 -6 -7 -8 -9 -10 -11 -12 -13 -14 -15 Lung particles Human heart Fetal heart Human eye Human brain (a) Human brain (response) B (Tesla) Earth field Urban noise 50 m Transistor 2 m 1 m Flux-gate magnetometer SQUID mT nT pT

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27 Thanks for your attention!
Hong-Chang Yang