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组会报告 毕小斌 01/11/2013
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紫外传感器阵列 光敏特性较好的TFT作为Sensor TFT，光照稳定性较好的TFT作为Switch TFT
Sanghun Jeon, Ihun Song, Seung-eon Ahn, et al. High Performance Transparent Photosensor Array Utilizing Triple Oxide Semiconductor (HIZO-IZO-HIZO) Thin Film Transistor, IEDM 2010, pp
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persistent photoconductivity (PPC)
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Sanghun Jeon, Seung-Eon Ahn, Ihun Song, et al
Sanghun Jeon, Seung-Eon Ahn, Ihun Song, et al. Gated three-terminal device architecture to eliminate persistent photoconductivity in oxide semiconductor photosensor arrays, Nature materials,2012
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想法 有源区先做成MZO/IGZO双沟道 用光刻胶保护Sensor TFT 用1:2000稀盐酸腐蚀Switch TFT的MZO层
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