Laser tracker’s calibration device 激光跟踪仪校准装置 Reporter: Gao ting 汇报人：高廷 Otc 年 10 月

Introduce about laser tracker’s performance evaluation （现有激光跟踪仪评定方法） Method for how to calibrate a laser tracker ’s angle & distance （激光跟踪仪测角和测距精度的校准方法） c （双轴激光跟踪仪校准装置） 4 Design plans for Laser tracker calibration device （ 4 种跟踪仪校准装置的设计方案） Contents 内容

1 Laser tracker’s performance evaluation Calibrating In-lab 实验室校准 Evaluating in-site 现场检查 Evaluating in-site means to check the performance of laser tracker measuring a point in workshop environment. 检查跟踪仪在某种特定的使用环境下所能达到的综合测量能力（如空间坐标 测量能力、空间测长测量能力）。 Two paths to laser tracker’s performance evaluation ( 激光跟踪仪的两种评定方式 ) Calibrating In-lab means to check the performance of laser tracker’s angle indexes Interferometer, laser distance meter, retro-reflector, environment sensor etc. in a standard environment laboratory and verify their maximum permission error(MPE). 检查的是集成在跟踪仪内部的双向测角编码器、激光干涉仪、激光测距仪、目 标跟踪传感器及目标反射镜、环境传感器等关键部件的技术指标是否满足生产 商提供的指标要求，即检查出设备的最佳测量能力。

Laser tracker （ linear slider ） whose standard magnitude is reference length; （激光干涉仪（直线导轨） -- 标准量是参考长度） Linear target array whose standard magnitude is the distance between target center coordinates and the target itself. （直线目标阵列 -- 标准量是目标中心点坐标和目标之间距离） 1 Laser tracker’s calibration method 现有激光跟踪仪校准方法 Calibrating In-lab 实验室校准 Calibrating In-site 现场校准 Fixed length scale whose standard magnitude is reference length. （定长标尺 -- 标准量是参考长度） Fixed target whose standard magnitude is space coordinates. （固定目标 -- 标准量是空间坐标） Laser Tracker’s commonly used calibration equipment 激光跟踪仪常用的校准设备

序号单位建立时间测量范围备注 1 中航 304 所 (AVIC 304 Institute) 1999 水平轴 36m 俯仰轴 2.1m horizontal axis 36m pitching axis 2.1m 水平轴、俯仰轴独立 Independent horizontal axis and pitching axis 2 中国计量院 2010 水平轴 80m 俯仰轴 1.2m 俯仰轴位于水平轴上 pitching axis above horizontal axis 3 成都飞机制造公司 2011 水平轴 25m 俯仰轴 1.0m 俯仰轴位于水平轴上 4 西安飞机制造公司 2012 水平轴 25m 仅有水平轴 5 航天计量测试技术 所 2013 水平轴 10m 俯仰轴 2.0m 水平轴、俯仰轴独立 At present the domestic main calibration method of laser tracker is double-axis calibration method: Horizontal axis is used to calibrate horizontal angle of tracker,built-in interferometer and rangefinder. Vertical axis is used to calibrate pitch angle of tracker. Units which have the ability to carry out calibrating In-lab in domestic are shown in Table 1. 目前国内激光跟踪仪的校准方法基本上采用双轴校准法： 水平轴 -- 校准跟踪仪的水平角和内置干涉仪及测距仪 垂直轴 -- 校准跟踪仪的俯仰角。 目前能够实现跟踪仪实验室校准的典型单位见表 1 。 1 Laser tracker’s calibration method 现有激光跟踪仪校准方法

2 Due-axis Laser tracker calibration principle 激光跟踪仪双轴校准原理 Basic idea --Adjust relative position between the laser tracker and rail in order to separate individual errors of system. 基本思路 -- 调整激光跟踪仪与导轨的相对位置分离出系统的单项误差。 Placed at one end of the horizontal guide rail 放置在水平导轨一端 Remain tracker's azimuth and pitch angle unchanged ， and calibrate its ranging error. （跟踪仪的方位角和俯仰角保持不变， 校准跟踪仪测距误差。） Remain tracker's pitch angle unchanged ， and calibrate its azimuth angle measurement error. （跟踪仪俯仰角保持不变时，校准跟踪仪 方位角的测角误差。） Remain tracker's azimuth unchanged ， and calibrate its pitch angle measurement error. （跟踪仪方位角保持不变，校准跟踪仪 俯仰角的测角误差。） Placed in front of the horizontal guide rail 放置在水平导轨前方 Placed in front of the verticle guide rail 放置在垂直导轨前方

Basic Principle--Placed tracker mirror and interferometer mirror on the same workbench,when the workbench is moved a certain distance, displacement measured by the interferometer- L0 and coordinates of two target points measured by tracker --P1,P2 can be obtained.Then the distance between the 2 points (L) can be calculated by the following formula: in which A means angle between 2 target points. 基本原理 -- 跟踪仪的反射镜与干涉仪的反射镜放置在同一工作台上，当工作台移动一定距离后，得到干涉仪的 位移量 L0 和跟踪仪的两点坐标 P1 、 P2 ，它们之间的距离为 L, 其中 A 为两目标点之间的交角。 2 Due-axis Laser tracker calibration principle 激光跟踪仪双轴校准原理

Remain tracker's azimuth and pitch angle unchanged 当方位角和俯仰角不变时 Ignored angle measurement impact,ranging error of tracker is 忽略测角误差影响，跟踪仪的测距误差 Ignored ranging and pitch impact, azimuth measurement error of tracker is 忽略测距和俯仰角的影响，跟踪仪的方位角测角误差 Remain pitch angle unchanged ， and change azimuth 当俯仰角不变，方位角 改变时 Remain azimuth unchang- ed ， and change pitch angle. 当方位角不变俯仰角改 变时 Ignored ranging and azimuth impact, pitch angle measurement error of tracker is 忽略测距和方位角的影响，跟踪仪的俯仰角测角误差 2 Due-axis Laser tracker calibration principle 激光跟踪仪双轴校准原理

3 Due-axis Laser tracker calibration device 双轴激光跟踪仪校准装置 (oprating stroke) ＞ 10m 工作行程 (straightness)≤0.15mm 直线度 (uncertainty of measurement) 测量不确定度 ( L) μm,k=2, (working speed) ＞ 500mm/s 运动速度 ( oprating stroke ) ＞ 2.0m 工作行程 ( straightness )≤0.05mm 直线度 (uncertainty of measurement) 测量不确定度 （ L) μm,k=2, (working speed) ＞ 100mm/s 运动速度 Vertical axis 垂直轴 Horizontal axis 水平轴 Technical parameters 技术参数

Horizontal X axis:10m precision linear guide rail,length measuring system Vertical Y axis:2m linear guide system,length measuring system 4 environmental compensation system ， dual-axis motion controlling system, Analysising software platform,etc. ( 水平 X 轴： 10m 精密直线导轨、长度测量系统 垂直 Y 轴： 2m 直线导轨系统、长度测量系统 四路环境补偿系统 双轴运动控制系统 分析处理软件应用平台等组成。 ) Regard laser interferometer as measurement standard of the distance between two target points,place tracker mirror and interferometer mirror on workbench,which is motor-driven and move along linear guide rail.The deviation between distance that interferometer moved and distance that target moved can reflect the measurement error. ( 采用激光干涉仪作为两点之间距离的测量标准，干涉仪的反射镜和跟踪仪的反射 镜放置在工作台上，工作台由电机驱动，沿直线导轨运动。工作台移动时干涉仪 反射镜的移动距离与被测目标的移动距离的偏差值反映了被校系统的测量偏差。 ) Components 系统构成 Working process 工作过程 3 Due-axis Laser tracker calibration device 双轴激光跟踪仪校准装置

10m long precision linear guide rail which has cog belt structure, feature ： fast movement speed,can save time of calibrating. Supporting mechanism--select marble platform with high rigidity and stability as a reference feature ： high flatness and straightness accuracy,large-area workbench environmental compensation uints--4 branches of temperature ， 1 branch of air pressure ， 1 branch of humidity feature:placed on horizental guide rail,closed to light path ， can measure environment temperature around light path with higher accuracy. 10m 精密直线导轨 --- 选用齿形带结构的直线运动导轨 特点：运动速度快，可大大减少校准所用的 时间。 支撑机构 --- 选择刚性好稳定性强的大理石平台作为基准 特点：平面度和直线度精度高，工作平台 面积大。 环境补偿单元 ---4 路温度、 1 路气压、 1 路湿度 特点：放置在水平导轨上，与光路靠近，可更准 确的获得测量光路所处环境的温度值。 Horizontal axis 水平导轨 3 Due-axis Laser tracker calibration device 双轴激光跟踪仪校准装置

laser interferometer 激光干涉仪 reference platform 基准平台 Interferometric combination 干涉组合 interferometer mirror 干涉仪反射镜 linear guide rail 直线导轨 air sensor 空气传感器 marble platform 大理石平台 moving platform 移动平台 3 Due-axis Laser tracker calibration device 双轴激光跟踪仪校准装置

2m long vertical linear guide rail which is ball screw driven feature:high load and long-term bearing capacity, reliable linear motion and stability. basis platform ： solid metal platform of Level 00 feature:no distortion,can adjust to parallel with the horizontal guide rail. Supporting mechanism ： l=l type metal back frame feature ： solid structure ， Stable structure,good shock resistance, convenient to adjust rail straightness. 2m 垂直直线导轨 ---- 选用滚珠丝杆传动的直线导轨 特点：具有高载荷和长时承载的能力，能够拥有可靠的直线运动、稳定性好。 基础平台 级稳固的金属平台 特点：不易变形，可通过调整与水平导轨平行。 支撑机构 ---I=I 型金属背架， 特点：结构稳定，抗震性好，便于导轨直线度调整。 Vertical guide rail ( 竖直导轨 ) 3 Due-axis Laser tracker calibration device 双轴激光跟踪仪校准装置

Controller which adopts PLC as control core, and is responsible for motion control of entire system feature:it can improve the system's stability and controlling accuracy,enhance system's anti-interference ability. Motor:the horizontal and vertical axes are both driven by AC servo motor features:can be controlled by high-speed pulse output of PLC, select high-speed pulse + direction control mode,can pinpoint the location of the mechanical movement position. Operation ---- touch screen and keyboard control in two ways features:Touch screen can provide a clear man-machine interface,keyboard control can make the operation easier and more convenient 控制器 --- 采用 PLC 作为控制核心，负责整个系统的运动控制 特点：可提高系统的稳定性和控制精度，增强系统的抗干扰性。 电机 --- 水平轴和垂直轴都采用 AC 伺服电机驱动 特点：可由 PLC 的高速脉冲输出口控制，选用高速脉冲 + 方向的控制模式，可以精确定位机 械运动位置。 操作方式 ---- 触摸屏与键盘控制两种方式 特点：触摸屏可提供清晰的人机操作界面，键盘控制可使操作更加简单方便。 controller 控制器 3 Due-axis Laser tracker calibration device 双轴激光跟踪仪校准装置

software platform 软件平台 Interference ranging module （干涉测距模块） This module can achieve Interferometer configuration, display interference data,and control measurement mode. 可以实现干涉仪的配置、干涉数据的显示、测量模式控制。 Environmental monitoring module 环境监控模块 This module can display,collect and manage lab environment state automatically, support real-time monitoring of quad temperature, one branch of pressure and one branch of humidity. 可以自动采集显示、管理实验室环境状态，支持四路温度、一路气压、一路湿度的实时监控 Dual-axis linear motion guides controlling module 双轴直线运动导轨控制模块 This module can control movements of horizontal and vertical linear motion guides in several patterns, including manual, automatic, cycling moving mode,etc. 可以对水平直线运动导轨和竖直直线运动导轨进行多种运动模式控制，包括手 动、自动、循环等运动模式。 data managing module 数据管理模块 This module can manage data measured by interferometer, including data naming, storage, display, analysis, preservation, and other functions, in addition,analysis function include calibration results evaluation. 可以对干涉仪测量是数据进行管理，包括数据的命名、存储、显示、分析保存 等功能，其中分析功能中包括对被校设备校准结果的评价。 3 Due-axis Laser tracker calibration device 双轴激光跟踪仪校准装置

Software--chart 软件 -- 结构图 temperatu repressure humidity 温度 气压 湿度 horizontal /vertical axis displacement 水平轴位移 竖直轴位移 data managing module 数据管理模块 interferometer measurement data 干涉仪测量数据 relationships of modules 各模块之间的关系

Software-- Measurement and data management module 软件 -- 测量及数据管理模块

Software--Environmental monitoring module 软件 -- 环境监控模块

Software-- Due-axis motion control module 软件 -- 双轴运动控制模块

四、 Tracker calibration device design scheme comparison 跟踪仪校准装置设计方案比较 Program1 Independent vertical axis, horizontal axis adopt three-light-path interferometry, and marble guide rail, air floating workbench. （竖轴独立，水平轴采用三光路干涉测量, 水平轴采用大理石导轨，气浮式工作 台。） Program2 Vertical axis above horizontal axis, horizontal axis adopt three-light-path interferometry, and marble guide rail, air floating workbench. 竖轴位于水平轴上，水平轴采用三光路干涉测量，水平轴采用大理石导轨，气浮 式工作台。 Program3 Independent vertical axis, horizontal axis adopt single-light-path interferometry, and marble guide rail, air floating workbench. 竖轴独立，水平轴采用单光路干涉测量，水平轴采用大理石导轨，气浮式工作台 。 Program4 Independent vertical axis, horizontal axis adopt single-light-path interferometry, and marble guide rail,metal guide rail. 竖轴独立，水平轴采用单光路干涉测量，水平轴采用大理石平台，金属导轨。

Scheme 1 方案 1 light path 光路 Horizontal axis adopt three-light-path synchronous interferometry, compensate Abbe error in real time to achieve "coaxial synclastic" measurement. 水平轴采用三光路干涉同步测量，实时进行阿贝误差补偿，实现 “ 同轴同向 ” 测量。 structure 结构 independent horizontal axis and vertical axis.Horizontal axis adopt marble guide rail,air floating workbench. Vertical linear guide rail is mechanical axis ， which is ball screw driven.. 水平轴与竖轴分开，各自独立。水平轴采用大理石导轨，气浮式工作台。竖轴为机械 轴，滚珠丝杆传动。 index 指标 horizontal axis measurable range ( 横轴可测范围 ):<80m, Measurement Uncertainty （测量不确定度） : L  m Verticle axis measurable range （竖轴可测范围） :>2m, Measurement Uncertainty （测量不确定度） :1+0.5L  m Feature 特点 High precision, simple structure. （精度高，结构简单。）

The overall effect diagram 总体效果图 Scheme 1 方案 1

Independent vertical axis 独立竖轴 Scheme 1 方案 1

Horizontal axis three-light-path 水平轴三光路 Scheme 1 方案 1

Vertical axis single -light-path 竖轴单光路 Scheme 1 方案 1

Scheme 2 方案 2 Horizontal axis adopt three-light-path synchronous interferometry, compensate Abbe error in real time to achieve "coaxial synclastic" measurement. 水平轴采用三光路干涉同步测量，实时进行阿贝误差补偿，实现 “ 同轴同向 ” 测量。 Vertical axis is above horizontal axis ， biaxial linkage.Horizontal axis adopt marble guide rail,air floating workbench. Vertical linear guide rail is mechanical axis ， which is ball screw driven.. 竖轴位于横轴上，双轴联动。水平轴采用大理石导轨，气浮式工作台。竖轴为机械轴 ，滚珠丝杆传动。 horizontal axis measurable range ( 横轴可测范围 ):<80m, Measurement Uncertainty （测量不确定度） : L mm Verticle axis measurable range （竖轴可测范围） :1m, Measurement Uncertainty （测量不确定度） :2+2L mm(single marble 4m) Horizontal axis has high precision, can provide standard laser plane, while its structure is complicated, and vertical axis's precision is difficult to ensure. 横轴精度高，可提供标准激光平面，结构复杂，竖轴精度能难保证。 light path 光路 structure 结构 index 指标 Feature 特点

Scheme 2 方案 2 The overall effect diagram 总体效果图

The horizontal axis on the horizontal axis 竖轴位于水平轴上 Scheme 2 方案 2

The light path of vertical axis and horizontal axis move together 竖轴光 路与水平轴光路联动 Scheme 2 方案 2

Scheme 3 方案 3 Horizontal axis and vertical axis both adopt single-light-path interferometry, 横轴与竖轴均采用单光路干涉测量。 Independent vertical axis and horizontal axis.Horizontal axis adopt marble guide rail,air floating workbench. Vertical linear guide rail is mechanical axis ， which is ball screw driven.. 水平轴与竖轴分开，各自独立。水平轴采用大理石导轨，气浮式工作台。竖轴为机 械轴，滚珠丝杆传动。 horizontal axis measurable range ( 横轴可测范围 ):<80m, Measurement Uncertainty （测量不确定度） :1+0.5L  m Verticle axis measurable range （竖轴可测范围） :>2m, Measurement Uncertainty （测量不确定度） :1+0.5L  m Horizontal axis has high precision, can provide standard laser plane, while its structure is complicated, and vertical axis's precision is difficult to ensure. 横轴精度高，可提供标准激光平面，结构复杂，竖轴精度能难保证。 light path 光路 structure 结构 index 指标 Feature 特点

Scheme 3 方案 3 The overall effect diagram 总体效果图

Verticle axis single-light-path 水平轴单光路 Scheme 3 方案 3

Scheme 4 方案 4 The overall effect diagram 总体效果图

Marble platform + machine guide rail 大理石平台 + 机械导轨 Scheme 4 方案 4

Thank you ！