Vibration measurement 南台科技大學 劉雲輝 南台科技大學 劉雲輝 Vibration measurement 劉雲輝 南台科技大學 機械工程系 電話﹕(06) 2533131 ext.3538 電郵﹕yhliu@mail.stut.edu.tw 網頁﹕faculty.stut.edu.tw/~yhliu/ Dec 20 , 2005
南台科技大學 劉雲輝 Establishing Sensitive Process Tool Vibration Thresholds (of degraded performance) IEST-RP-CC024.1 “Measuring and Reporting Vibration in Microelectronics Facilities” Direct measurement placed on a table excited in a precisely controlled shaker Modal testing and analysis natural frequency and mode shape finite element method─difficult to model complex equipment due to no corroborated 、k and B.C. Field measurement installed in a number of location with different vibration level place a shaker on the floor near the equipment
Assessment of Vibration Sensitivity 南台科技大學 劉雲輝 Assessment of Vibration Sensitivity Establishing sensitive process tool vibration thresholds Application of controlled vibrational base excitation vibration sensitivity of a 1000x Nikon microscope