紫外曝光與蝕刻實驗 星期一 黃啟裕: 楊昌浩: 電磁撿測實驗, 光學灌注 陳智城: 雜訊測量, 氧化物製作
紫外曝光與蝕刻實驗 星期三 黃啟裕: 吳宇正: 光學灌注, 電磁檢測 陳名傑: 雜訊測量, 氧化物製作, 磁共振,
實驗有缺失: 暑假當義工, 進一步加強物理與技術的訓練 暑假提供專題研究機會: 先提出實驗構想
微米與奈米科技
紫外光曝光 電子束曝光 全像術 光罩 光阻- 正光阻與負光阻
● The pattern for resistivity and Hall measurements V = V3-V2→Resistance Vh = V2-V1→Hall coefficient
5 μm
Superconductor YBCO Normal Metal Barrier Ag or Au Insulator Substrate Cross-sectional diagram of a ramp-edge superconductor/normal-metal/superconductor (SNS) junction
Geometry of a serial SQUID array with junction width 3 m
Mask Aligner for Photolithography (in clean room, 10000 ppm) UV lamp Mask holder Sample stage
Directly Coupled SQUID Magnetometer Imd Ib V Imd Direct modulation Ime Ime Integrated modulation coil Ib V
Device Fabrication Step-edge Junctions and SQUID Arrays
Fabrication of step-edge substrates MgO Ar+ beam (a) (b) Step-edge line
Surface morphology of step-edge substrates probed with atomic force microscopy
AFM image of the step-edge substrate Surface morphology of MgO(100) substrate
Excimer Laser System Wavelength = 248 nm Pulse Energy = 650 mJ Max. Rep. Rate = 50 Hz Average Power = 30 Watts
3-D Surface Profiler Device Characterization Surface Morphology Spatial Resolution ( 0.1 nm)
Schematic diagram of the rf sputtering system used La0.7CaCa0.3MnO3 Nd0.7Sr0.3MnO3 PrBa2Cu3Oy Ar+O2 gas YBa2Cu3Oy 5.3 cm 3.5 cm 3 cm shutter rf sputtering gun sample holder water-cooled stainless-steel shielding L. M. Wang, H. W. Yu, H. C. Yang and H. E. Horng, Physica C, 256, 57 (1996).
Geometry of a serial SQUID array with junction width 3 m
Typical voltage-flux curve of a SQUID magnetometer at 77 K
Ib V (a) (b) (c)
Weak Magnetic Fields Biomagnetic fields Environmental fields B (Tesla) 10 -4 -5 -6 -7 -8 -9 -10 -11 -12 -13 -14 -15 Lung particles Human heart Fetal heart Human eye Human brain (a) Human brain (response) B (Tesla) Earth field Urban noise Car @ 50 m Transistor chip @ 2 m die @ 1 m Flux-gate magnetometer SQUID mT nT pT
Thanks for your attention! Hong-Chang Yang